Labs & Technology Final Production

Micro Electro Mechanical Systems Laboratory

The most recent addition to the Center is our Micro Electro Mechanical Systems Laboratory (MEMS).

This facility is similar to a computer chip fabrication plant but the emphasis is on much more than just electronics. Our equipment helps create microscopic machines that can perform tasks ranging from traditional mechanical applications -- such as sensing their environment with pressure and acceleration sensors -- to biomedical applications that dispense drugs and perform analysis on tissue and body fluids. These machines can route optical signals and even harvest energy from the environment to eliminate the need for external power sources. In this exciting lab, new applications for MEMS devices are being conceived every day.

Technology:

Through the MEMS lab, you access:

• Class 10,000 Clean Room
• Mask Aligner
• Spin Coater
• RF Sputterer
• DC Sputterer
• Reactive Ion Etcher (RIE)

For more information concerning the MEMS lab, please refer to the MEMS lab home page at: http://www.engr.pitt.edu/site/scmns/mem/

Swanson Center for Product Innovation

 

Questions?

• Don Shields
• Phone: 412-624-8120
• swansoninfo@
  engr.pitt.edu